AZOM

Utilizing High Current Plasma FIB-SEM for Sample Preparation

When preparing cross sections, the standard procedure using the FIB-SEM technique is the use of high currents to quickly remove material, then lower the FIB current for an improved beam profile and ...
AZOM

Laser Ablation for Site-Specific TEM Sample Preparation in a FIB-SEM

This article examines the use of femtosecond (fs) laser ablation for site-specific TEM sample preparation in a FIB-SEM. Various workflows are shown facilitating TEM lamella preparation of regions of ...
Semiconductor Engineering

Challenges Grow For CD-SEMs At 5nm And Beyond

CD-SEM, the workhorse metrology tool used by fabs for process control, is facing big challenges at 5nm and below. Traditionally, CD-SEM imaging has relied on a limited number of image frames for ...
Nanowerk

Critical Dimension Scanning Electron Microscopy (CD-SEM): Precision Metrology for Nanoscale Fabrication

In the world of nanotechnology, where structures are measured in billionths of a meter, precise imaging and measurement techniques are essential. Critical Dimension Scanning Electron Microscopy ...
AZoNano

Using Software to Compare Chemical Composition and 3D Topography in SEM

The significant majority of SEMs (Scanning Electron Microscopes) are equipped with EDS (Energy Dispersive X-Ray Spectroscopy, also known as EDX), which facilitates the quantitative analysis of ...